How to study biological samples by FIB/SEM?
نویسندگان
چکیده
The focused ion beam (FIB)/scanning electron microscope (SEM) is a scanning microscope with an electron column and an ion column embedded in the same specimen chamber; both beams are aiming at the same point on the specimen surface. The FIB, generated by a Ga Liquid Metal Ion Source (LMIS), impacts the sample normal to the surface and can be focused to a spot as small as few nanometres. The FIB can be rastered in a user defined pattern over larger areas to selectively sputter and mill away the surface. By flooding the exposed surface with specific gases, during ion or electron bombardment new material can be deposited or some specific face can be removed faster (enhanced etching). The combination of both unselective ion milling and selective etching using reactive species creates a very powerful sample preparation tool. The focused ion beam operated at low beam currents is used for imaging, and high beam currents are used for site specific in situ sputtering or milling. The signal from the sputtered secondary ions or secondary electrons is collected to form an image. The FIB/SEM investigation can be applied on bulk samples, prepared for conventional SEM or on bulk resin-embedded specimens prepared for conventional TEM, at any chosen site. Modern Research and Educational Topics in Microscopy. A. Méndez-Vilas and J. Díaz (Eds.) ©FORMATEX 2007
منابع مشابه
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